Wafer Handling

Wafer handling – Precision with a system

In semiconductor manufacturing, wafer handling is a critical part of highly automated systems and their interconnection. Silicon wafers have to be moved between stations highly dynamically and precisely with minimal vibrations, for example, during the loading and unloading of compartments, during sorting and alignment, as well as during transport and storage in cassettes (FOUP, FOSB, or open cassettes). Any deviation in positioning, dynamics, or synchronization can affect quality, stability, and throughput.

For OEMs, therefore, short cycle times, maximum positioning accuracy, and reproducible motion profiles are vital. At the same time, the requirements for "copy exact," international SEMI standards, and cybersecurity within the meaning of the Cyber Resilience Act are increasing.

The solution set "Wafer Handling" from Bosch Rexroth addresses these requirements with a preconfigured, modular automation kit based on ctrlX AUTOMATION – with optimally coordinated components for motion, drive, I/O, communication, and safety. OEMs receive a ready-to-use solution set for wafer handling systems that reduces engineering and integration work, shortens time to market, and at the same time ensures performance, compliance with standards, and cybersecurity.

The image shows the wafer handling process in the semiconductor industry. The im-age is a rendering and has been color-coded from blue to red.

The benefits for you in wafer handling:

• Ready to use quickly thanks to the pre-configured solution set

• Open motion core with API for OEM customizing

• SEMI compliant and CRA ready with security by design

• Maximum dynamics thanks to highly dynamic servo technology, oversampling, and vibration control

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Ready-to-use solution set for wafer handling

The picture shows a wafer handling prozess in the back. Hexagonal honeycombs are depicted. The honeycombs contain the components of the solution set. Product images or app icons are also shown.

The solution set "Wafer Handling" combines optimally matched hardware and software for wafer handling systems in the semiconductor industry. The set is based on ctrlX CORE^plus with ctrlX OS and ctrlX MOTION as a powerful motion core. Using the MOTION API, OEMs can integrate their own motion functions, kinematics, and interfaces and protect their specific expertise.

Scalable drive solutions with ctrlX DRIVE (DC 48 V, AC 200/230 V or AC 400 V) as well as oversampling-capable ctrlX I/O enable highly dynamic, precise, and low-vibration movements, which are essential for short cycle times and reproducible processes in wafer handling.

Open interfaces such as OPC UA and EtherCAT ensure straightforward integration into existing semiconductor architectures. In addition, functional safety, cybersecurity in accordance with IEC 62443-4-2 SL2, and relevant SEMI standards support rapid certification and global deployment.

The result: a modularly expandable, future-proof automation package for high-performance and resilient wafer handling systems.

Topology diagram of the ctrlX AUTOMATION system featuring a central ctrlX COREplus controller, connected to optional components (ctrlX IPC, ctrlX HMI, ctrlX SAFETY) running on ctrlX OS. ctrlX Drive solutions are shown at the buttom.

Example application for wafer handling

The control system ctrlX CORE^plus with ctrlX MOTION controls the ctrlX DRIVE (DC 48 V, AC 200/230 V, AC 400 V) drives and oversampling-capable ctrlX I/O modules. Communication takes place via OPC UA and EtherCAT. Optionally, the safety solution ctrlX SAFETY, the HMI solution ctrlX HMI, and Linux-based ctrlX IPCs as well as vision and vibration solutions can be added.

Configure 400 V solution

Configure 200 V solution

ctrlX OS Community

Do you need further assistance? In the ctrlX OS Community you will find blog posts, GitHub applications, and how-to articles on topics related to wafer handling and many other application areas of ctrlX AUTOMATION.

Go to ctrlX OS Community!

Hardware and software components of the solution set

This image displays the control platform ctrlX CORE. Alongside it is the app icon for ctrlX OS, the Linux-based operating system that runs on the control.

ctrlX COREplus – The control center

ctrlX CORE^plus is the control center of the solution set. Building on the Linux-based operating system ctrlX OS, it combines motion, PLC, and connectivity in an open architecture. Apps such as ctrlX MOTION, OPC UA Server/Client, and EtherCAT run directly on the platform. Security by design and Linux-based architecture meet key requirements of modern semiconductor systems.

ctrlX MOTION – Highly dynamic motion control

ctrlX MOTION enables precise, synchronized movements for wafer handling systems. In conjunction with coordinated kinematics, the solution supports SCARA, frog-leg, articulated arm, and cartesian/gantry kinematics. High dynamics, precise positioning, and low-vibration profiles ensure stable processes with short cycle times.

The image shows Motion Icon with a puzzle piece. This symbolizes the expansion of Motion with its own IP.

MOTION API – Open for OEM IP

The Motion API enables OEMs to add functions or integrate their own specific motion algorithms. This ensures they retain control of their customizing and protect their IP, while also reducing the engineering work, e.g. through updates, maintenance, backup & restore, or user management.

Shown are various products from the ctrlX DRIVE family: a servo terminal for the ex-tra-low voltage range, cabinet-free servo drive technology, a modular servo drive, and a servo motor.

ctrlX DRIVE – Scalable drive solutions

ctrlX DRIVE covers DC 48 V, AC 200/230 V, and AC 400 V and can be combined with motors such as . The modular drive technology enables dynamic, precise, and low-vibration movements – essential for high-performance wafer handling.

The image shows various ctrlX I/O modules connected to a bus coupler.

ctrlX I/O with oversampling – Temporal precision

Oversampling-capable ctrlX I/O modules capture signals with high temporal resolution and support extremely short response times. This increases reproducibility and performance in wafer handling and reduces variability in highly dynamic movements.

OPC UA Server & Client – Open integration

OPC UA allows for the standardized networking of the controller, third-party components, and higher-level systems. Process data and diagnostics are exchanged securely and transparently – an important requirement for modular semiconductor architectures.

The image shows the app icon EtherCAT Master.

EtherCAT Master – Deterministic real-time

The EtherCAT Master app allows ctrlX CORE to perform deterministic EtherCAT communication with low cycle times as a master – ideal for highly dynamic motion profiles in wafer handling systems.

The image shows the safety control ctrlX SAFETY.

ctrlX SAFETY – Functional safety

Scalable safety functions as an app within ctrlX AUTOMATION. From safe I/Os to drive-related safety functions – efficiently integrated and standard-compliant.

The image shows various ctrlX HMI devices, such as displays, web panels, housed panel PCs, and other devices from the ctrlX HMI portfolio.

ctrlX HMI – Web-based visualization

Browser-based operation, parameterization, and diagnostics speed up commissioning and service. The HMI can be flexibly integrated into modular machine concepts.

The image shows various industrial PC models offered by Bosch Rexroth.

ctrlX IPC – Platform for vision & AI

A Linux-based IPC can be added to give the system additional computing power for HMI, vision, AI, or edge applications – fully integrated into the ctrlX AUTOMATION architecture.

ctrlX World partner solutions – Expandability

The partner world ctrlX World provides expandability by the possibility to add solutions such as vibration damping (e.g. CAPE from Cognibotics) or vision options. This allows the solution kit to be extended in a targeted manner depending on the machine concept.

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